Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-12-01
Author Information
Name | Institution |
---|---|
Chittaranjan Das | Brandenburg University of Technology |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
236 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |