Publication Information

Title:
Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-12-01

Author Information

Name Institution
Chittaranjan DasBrandenburg University of Technology

Films

Plasma TiO2


Thermal TiO2


Thermal TiO2


Thermal TiO2


Film/Plasma Properties

Substrates

Keywords

Notes

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