Chittaranjan Das Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chittaranjan Das returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
3Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
4In-gap states in titanium dioxide and oxynitride atomic layer deposited films