Chittaranjan Das Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chittaranjan Das returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2In-gap states in titanium dioxide and oxynitride atomic layer deposited films
3Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
4Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties