Chittaranjan Das Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chittaranjan Das returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
2Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
3Analysis of nitrogen species in titanium oxynitride ALD films
4In-gap states in titanium dioxide and oxynitride atomic layer deposited films