Publication Information

Title: Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor

Type: Journal

Info: Nanoscale Research Letters 2014, 9:223

Date: 2014-04-11

DOI: http://dx.doi.org/10.1186/1556-276X-9-223

Author Information

Name

Institution

Technische Universit├Ąt Braunschweig

Films

Plasma Al2O3 using SENTECH

Deposition Temperature = 80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

218



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