Title: Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
Type: Journal
Info: Nanoscale Research Letters 2014, 9:223
Date: 2014-04-11
DOI: http://dx.doi.org/10.1186/1556-276X-9-223
Name
Institution
Technische Universität Braunschweig
Characteristic
Analysis
Diagnostic
218
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