Irina Kärkkänen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Irina Kärkkänen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3In-gap states in titanium dioxide and oxynitride atomic layer deposited films
4Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study