Irina Kärkkänen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Irina Kärkkänen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
2Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3Analysis of nitrogen species in titanium oxynitride ALD films
4In-gap states in titanium dioxide and oxynitride atomic layer deposited films