Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Simone Brizzi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simone Brizzi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
2Analysis of nitrogen species in titanium oxynitride ALD films
3Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition