Simone Brizzi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simone Brizzi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
2Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
3Analysis of nitrogen species in titanium oxynitride ALD films