Jessica Schneidewind Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jessica Schneidewind returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Analysis of nitrogen species in titanium oxynitride ALD films
2Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
4Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications