Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
Type:
Journal
Info:
J. Vac. Sci. Technol. B 32(3), May/Jun 2014
Date:
2013-07-15
Author Information
Name | Institution |
---|---|
Nelson Y. Garces | U.S. Naval Research Laboratory |
Films
Plasma Al2O3
Plasma TiO2
Film/Plasma Properties
Substrates
Keywords
Notes
195 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |