Nelson Y. Garces Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nelson Y. Garces returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor |
| 2 | Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications |