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Publication Information

Title: Room temperature atomic layer deposition of TiO2 on gold nanoparticles

Type: Journal

Info: Journal of Vacuum Science & Technology A 35, 01B121 (2017)

Date: 2016-11-22

DOI: http://dx.doi.org/10.1116/1.4971398

Author Information

Name

Institution

Yamagata University

Yamagata University

Yamagata University

Yamagata University

Yamagata University

Yamagata University

Films

Plasma TiO2 using Custom

Deposition Temperature = 25C

3275-24-9

7440-37-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

JASCO M-220

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Thickness

SEM, Scanning Electron Microscopy

JEOL JSM-7600F

Substrates

Au

Silicon

Keywords

Notes

903



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