Publication Information

Title:
Room temperature atomic layer deposition of TiO2 on gold nanoparticles
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 35, 01B121 (2017)
Date:
2016-11-22

Author Information

Name Institution
Ko KikuchiYamagata University
Masanori MiuraYamagata University
Kensaku KanomataYamagata University
Bashir AhmmadYamagata University
Shigeru KubotaYamagata University
Fumihiko HiroseYamagata University

Films

Plasma TiO2


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Substrates

Au
Silicon

Keywords

Notes

903