Shigeru Kubota Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Kubota returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
2RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
3Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
4Room temperature atomic layer deposition of TiO2 on gold nanoparticles
5Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
6Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
7Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
8Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
9RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
10Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
11Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
12Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
13RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor