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Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
Type:
Conference Proceedings
Info:
ECS Meeting Abstracts
Date:
2016-10-05
Author Information
| Name | Institution |
|---|---|
| Fumihiko Hirose | Yamagata University |
| K. Tokoro | Yamagata University |
| Kensaku Kanomata | Yamagata University |
| Masanori Miura | Yamagata University |
| Bashir Ahmmad | Yamagata University |
| Shigeru Kubota | Yamagata University |
Films
Film/Plasma Properties
Characteristic: Surface Reactions
Analysis: ATR-FTIR
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Substrates
| Si(100) |
Notes
| 872 |