Kensaku Kanomata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kensaku Kanomata returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
2	Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
3	Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
4	Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
5	Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
6	Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
7	Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
8	Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
9	Room temperature atomic layer deposition of TiO2 on gold nanoparticles
10	Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
11	Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
12	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
13	RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
14	RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
15	RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
16	Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source

Shortcuts

© 2014-2020 plasma-ald.com