Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
Type:
Journal
Info:
IEICE Transactions on Electronics Vol.E98-C No.5 pp.382-389
Date:
2015-05-01
Author Information
| Name | Institution |
|---|---|
| P. Pungboon Pansila | Yamagata University |
| Kensaku Kanomata | Yamagata University |
| Bashir Ahmmad | Yamagata University |
| Shigeru Kubota | Yamagata University |
| Fumihiko Hirose | Yamagata University |
Films
Film/Plasma Properties
Characteristic: Deposition Kinetics, Reaction Mechanism
Analysis: IRAS, Infrared Reflection Absorption Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| Silicon |
Notes
| 524 |