2022 Year in Review

April 2023 Stats


The publication database currently has 1686 entries.
208 Films
282 Precursors
78 Dep Hardware Sets
254 Characteristics
93 Theses
5172 Authors

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2021 Year in Review
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Recent Database Additions
Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis Experimental and theoretical determination of the role of ions in atomic layer annealing Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature

P. Pungboon Pansila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Pungboon Pansila returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
2RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
3Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
4Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
5Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
6Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
7RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
8Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
9Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
10RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma

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