P. Pungboon Pansila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Pungboon Pansila returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
2Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
3Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
4RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
5Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
6RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
7Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
8Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
9Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
10Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy