P. Pungboon Pansila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Pungboon Pansila returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
2RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
3Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
4Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
5Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
6Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
7RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
8Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
9Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
10RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma