Ga2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ga2O3 films returned 27 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
2Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
3Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
4Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
5Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
6Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
7Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
8Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
9Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
10Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
11Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
12Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
13Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
14RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
15Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
16Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
17Plasma enhanced atomic layer deposition of Ga2O3 thin films
18Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
19Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
20Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
21Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
22Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
23Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
24Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
25α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
26Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors