Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3

Type:
Journal
Info:
Applied Physics Letters 122, 092101 (2023)
Date:
2023-02-10

Author Information

Name Institution
Elias KluthOtto-von-Guericke University
Michael FayUniversity of Nottingham
Christopher ParmenterUniversity of Nottingham
Joseph W. RobertsUniversity of Liverpool
Emily SmithUniversity of Nottingham
Craig StoppielloUniversity of Nottingham
Fabien C-P. MassabuauUniversity of Strathclyde
Rüdiger GoldhahnOtto-von-Guericke University
Martin FenebergOtto-von-Guericke University

Films

Plasma Ga2O3



Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Morphology, Roughness, Topography
Analysis: Ellipsometry

Characteristic: Dielectric Function
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Valence Band
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Sapphire

Notes

1675