Fabien C-P. Massabuau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien C-P. Massabuau returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
2Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
3α-Ga2O3 grown by low temperature atomic layer deposition on sapphire