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Fabien C-P. Massabuau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien C-P. Massabuau returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
3Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
4Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3