TEG, triethyl galium, GaEt3, CAS# 1115-99-7

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸Triethylgallium, elec. gr. (99.9999%-Ga)
2DOCK/CHEMICALS🇩🇪Triethylgallium
3Pegasus Chemicals🇬🇧Triethylgallium

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 33 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A route to low temperature growth of single crystal GaN on sapphire
2The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
3Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
4Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
5Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
6Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
7Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
8Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
9Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
10Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
11Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
12Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
13Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
14Layer-by-layer epitaxial growth of GaN at low temperatures
15Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
16Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
17α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
18Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
19Self-Limiting Growth of GaN at Low Temperatures
20Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
21P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
22P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping