Publication Information

Title:
Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2020, 12 (39), pp 44225-44237
Date:
2020-08-31

Author Information

Name Institution
Elham Rafie BorujenyUniversity of Alberta
Oles SendetskyiUniversity of Alberta
Michael D. FleischauerUniversity of Alberta
Kenneth C. CadienUniversity of Alberta

Films

Plasma Ga2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Band Gap
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: HAADF, High-Angle Annular Dark Field

Substrates

Sapphire
Si(100)
Si(111)
Si(110)

Keywords

Notes

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