The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 9, Q182-Q186
Date:
2013-06-13
Author Information
| Name | Institution |
|---|---|
| Yueh-Lin Lee | National Tsing Hua University |
| Tzu-Hsuan Huang | National Tsing Hua University |
| Chong-Lung Ho | National Tsing Hua University |
| Meng-Chyi Wu | National Tsing Hua University |
Films
Thermal Ga:ZnO
Thermal Ga:ZnO
Plasma Ga:ZnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Profilometry
Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Characteristic: Mobility
Analysis: Hall Measurements
Characteristic: Carrier Concentration
Analysis: Hall Measurements
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Optical Properties
Analysis: Spectrophotometry
Substrates
| Glass |
Notes
| 589 |