Publication Information

Title: The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition

Type: Journal

Info: ECS J. Solid State Sci. Technol. 2013 volume 2, issue 9, Q182-Q186

Date: 2013-06-13

DOI: http://dx.doi.org/10.1149/2.043309jss

Author Information

Name

Institution

National Tsing Hua University

National Tsing Hua University

National Tsing Hua University

National Tsing Hua University

Films

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

7732-18-5

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

10028-15-6

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Profilometry

Tencor Alpha-Step Profilometer

Resistivity, Sheet Resistance

Hall Measurements

-

Mobility

Hall Measurements

-

Carrier Concentration

Hall Measurements

-

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

-

Microstructure

SEM, Scanning Electron Microscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Rigaku RU-H3R

Optical Properties

Spectrophotometry

-

Substrates

Glass

Keywords

Notes

589



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