Publication Information

Title:
The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 9, Q182-Q186
Date:
2013-06-13

Author Information

Name Institution
Yueh-Lin LeeNational Tsing Hua University
Tzu-Hsuan HuangNational Tsing Hua University
Chong-Lung HoNational Tsing Hua University
Meng-Chyi WuNational Tsing Hua University

Films




Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements

Characteristic: Mobility
Analysis: Hall Measurements

Characteristic: Carrier Concentration
Analysis: Hall Measurements

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Optical Properties
Analysis: Spectrophotometry

Substrates

Glass

Keywords

Notes

589