GaTiOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaTiOx films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
2Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
3Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3