Joseph W. Roberts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joseph W. Roberts returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
3Atomic Layer Deposition of Niobium Nitride from Different Precursors
4Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
5A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor