Joseph W. Roberts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joseph W. Roberts returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
3Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
4Atomic Layer Deposition of Niobium Nitride from Different Precursors
5Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
6Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition