J. W. Roberts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. W. Roberts returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3α-Ga2O3 grown by low temperature atomic layer deposition on sapphire