Publication Information

Title:
Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
Type:
Journal
Info:
Sci. Technol. Adv. Mater. 15 (2014) 015003
Date:
2013-11-05

Author Information

Name Institution
Farzad Sadeghi-TohidiGeorgia Institute of Technology
David SametGeorgia Institute of Technology
Samuel GrahamGeorgia Institute of Technology
Olivier N PierronGeorgia Institute of Technology

Films


Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: SEM, Scanning Electron Microscopy

Substrates

Silicon
Al2O3

Keywords

Notes

1384