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Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
Type:
Journal
Info:
Sci. Technol. Adv. Mater. 15 (2014) 015003
Date:
2013-11-05
Author Information
| Name | Institution |
|---|---|
| Farzad Sadeghi-Tohidi | Georgia Institute of Technology |
| David Samet | Georgia Institute of Technology |
| Samuel Graham | Georgia Institute of Technology |
| Olivier N Pierron | Georgia Institute of Technology |
Films
Plasma TiO2
Plasma Al2O3
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Silicon |
| Al2O3 |
Notes
| 1384 |