Inductively coupled plasma sources from Plasma ALD, LLC.


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Olivier N Pierron Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Olivier N Pierron returned 2 record(s).

NumberTitle
1Atomic layer deposited Al2O3 capping layer effect on environmentally assisted cracking in SiNx barrier films
2Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C