Farzad Sadeghi-Tohidi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Farzad Sadeghi-Tohidi returned 1 record(s).

Number	Title
1	Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C