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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (19), pp 10228-10237
Date:
2015-04-28
Author Information
| Name | Institution |
|---|---|
| Mi-Jin Jin | Ulsan National Institute of Science and Technology |
| Junhyeon Jo | Ulsan National Institute of Science and Technology |
| Jung-Woo Yoo | Ulsan National Institute of Science and Technology |
Films
Film/Plasma Properties
Substrates
| ZnO |
Keywords
| Solar |
| Passivation |
Notes
| 319 |