Publication Information

Title: Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors

Type: Journal

Info: Journal of Electronic Materials February 2015, Volume 44, Issue 2, pp 651-657

Date: 2014-12-10

DOI: http://dx.doi.org/10.1007/s11664-014-3554-y

Author Information

Name

Institution

Hanyang University

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range = 33-102C

75-24-1

7782-44-7

Plasma TiO2 using Unknown

Deposition Temperature Range = 33-102C

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Diffusion Barrier Properties

Humidity Test

-

Mobility

-

-

Subthreshold Swing

-

-

Unknown

XPS, X-ray Photoelectron Spectroscopy

-

Thickness

-

-

Density

-

-

Substrates

ZnSnO (a-ZTO)

Keywords

Passivation

TFT, Thin Film Transistor

Diffusion Barrier

Notes

246



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