Publication Information

Title:
Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Phys. Chem. Chem. Phys., 2016, 18, 1042-1049
Date:
2015-11-18

Author Information

Name Institution
Lae Ho KimPohang University of Science and Technology (POSTECH)
Yong Jin JeongPohang University of Science and Technology (POSTECH)
Tae Kyu AnKorea National University of Transportation
Seonuk ParkPohang University of Science and Technology (POSTECH)
Jin Hyuk JangPohang University of Science and Technology (POSTECH)
Sooji NamElectronics and Telecommunication Research Institute, (ETRI)
Jaeyoung JangHanyang University
Se Hyun KimYeungnam University
Chan Eon ParkPohang University of Science and Technology (POSTECH)

Films

Plasma Al2O3



Film/Plasma Properties

Substrates

PEN, Polyethylene Napthalate

Keywords

Encapsulation
OLED
Diffusion Barrier
Nanolaminate

Notes

510