Publication Information

Title: The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain

Type: Journal

Info: Advanced Engineering Materials

Date: 2014-11-16

DOI: http://dx.doi.org/10.1002/adem.201400431

Author Information

Name

Institution

Georgia Institute of Technology

Films

Deposition Temperature Range N/A

75-24-1

7782-44-7

Deposition Temperature Range N/A

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

XPS, X-ray Photoelectron Spectroscopy

Unknown

Unknown

TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry

Unknown

Mechanical Properties

Tensile Testing

Unknown

Substrates

PET, Polyethylene Terephthalate

Cytop

PEIE, PolyEthyleneImine Ethoxylated

PHOST, PolyHydrOxySTyrene

Keywords

Cracking

Mechanical Properties

Notes

Ultratech Fiji PEALD Al2O3 and TiO2 mechanical behavior on polymeric substrates study.

292



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