Publication Information

Title:
The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
Type:
Journal
Info:
Advanced Engineering Materials
Date:
2014-11-16

Author Information

Name Institution
Anuradha BulusuGeorgia Institute of Technology

Films

Plasma Al2O3



Film/Plasma Properties

Characteristic: Unknown
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Unknown
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry

Characteristic: Mechanical Properties
Analysis: Tensile Testing

Substrates

PET, Polyethylene Terephthalate
Cytop
PEIE, PolyEthyleneImine Ethoxylated
PHOST, PolyHydrOxySTyrene

Keywords

Cracking
Mechanical Properties

Notes

Ultratech Fiji PEALD Al2O3 and TiO2 mechanical behavior on polymeric substrates study.
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