Publication Information

Title: The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain

Type: Journal

Info: Advanced Engineering Materials

Date: 2014-11-16

DOI: http://dx.doi.org/10.1002/adem.201400431

Author Information

Name

Institution

Georgia Institute of Technology

Films

Deposition Temperature Range N/A

75-24-1

7782-44-7

Deposition Temperature Range N/A

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

XPS, X-ray Photoelectron Spectroscopy

-

Unknown

TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry

-

Mechanical Properties

Tensile Testing

-

Substrates

PET, Polyethylene Terephthalate

Cytop

PEIE, PolyEthyleneImine Ethoxylated

PHOST, PolyHydrOxySTyrene

Keywords

Cracking

Mechanical Properties

Notes

Ultratech Fiji PEALD Al2O3 and TiO2 mechanical behavior on polymeric substrates study.

292



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