Inductively coupled plasma sources from Plasma ALD, LLC.


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Anuradha Bulusu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anuradha Bulusu returned 3 record(s).

NumberTitle
1Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
2The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
3Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers