Publication Information

Title:
Impact of interface materials on side permeation in indirect encapsulation of organic electronics
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 033203 (2020)
Date:
2020-02-20

Author Information

Name Institution
Ankit Kumar SinghGeorgia Institute of Technology
Wen-Fang ChouGeorgia Institute of Technology
Xiaojia JiaGeorgia Institute of Technology
Cheng-Yin WangGeorgia Institute of Technology
Canek Fuentes-HernandezGeorgia Institute of Technology
Bernard KippelenGeorgia Institute of Technology
Samuel GrahamGeorgia Institute of Technology

Films

Plasma Al2O3



Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Wetting Angle
Analysis: Contact Angle Measurement

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test

Substrates

PEN, Polyethylene Napthalate
Silicon

Keywords

Diffusion Barrier
Encapsulation

Notes

1464