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An economical, compact inductively coupled plasma source.

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Bernard Kippelen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bernard Kippelen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
2Impact of interface materials on side permeation in indirect encapsulation of organic electronics