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Search 1531 plasma ALD publications by:
Publication Information
Title:
Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
Type:
Journal
Info:
Journal of Applied Physics 120, 085315 (2016)
Date:
2016-07-19
Author Information
Name | Institution |
---|---|
A. Chaker | Grenoble Alps University (UGA) |
P. D. Szkutnik | Grenoble Alps University (UGA) |
John Pointet | Grenoble Alps University (UGA) |
Patrice Gonon | Grenoble Alps University (UGA) |
Christophe Vallée | Grenoble Alps University (UGA) |
Ahmad Bsiesy | Grenoble Alps University (UGA) |
Films
Plasma TiO2
Thermal TiO2
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
RuO2 |
Keywords
Reaction Mechanism |
Notes
909 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |