Title: Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
Type: Journal
Info: Journal of Applied Physics 120, 085315 (2016)
Date: 2016-07-19
DOI: http://dx.doi.org/10.1063/1.4960139
Name
Institution
Grenoble Alps University (UGA)
Grenoble Alps University (UGA)
Grenoble Alps University (UGA)
Grenoble Alps University (UGA)
Grenoble Alps University (UGA)
Grenoble Alps University (UGA)
3275-24-9
3275-24-9
Characteristic
Analysis
Diagnostic
Crystallinity, Crystal Structure, Grain Size, Atomic Structure
XRD, X-Ray Diffraction
PANalytical Xpert PRO MPD X-ray Diffractometer
Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Raman Spectroscopy
Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope
Chemical Composition, Impurities
XPS, X-ray Photoelectron Spectroscopy
Thermo VG-Scientific theta probe
Thickness
XRR, X-Ray Reflectivity
PANalytical Xpert PRO MPD X-ray Diffractometer
Density
XRR, X-Ray Reflectivity
PANalytical Xpert PRO MPD X-ray Diffractometer
Images
TEM, Transmission Electron Microscope
FEI Technai F20
RuO2
Reaction Mechanism
909
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