Publication Information

Title: Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy

Type: Journal

Info: Phys. Chem. Chem. Phys., 2018, 20, 180-190

Date: 2017-11-20

DOI: http://dx.doi.org/10.1039/C7CP05373H

Author Information

Name

Institution

University of Paderborn

University of Paderborn

Ruhr-University Bochum

Ruhr-University Bochum

University of Paderborn

Films

Plasma Al2O3 using Custom ECR

Deposition Temperature = 100C

75-24-1

7782-44-7

Plasma TiO2 using Custom ECR

Deposition Temperature = 100C

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

1061



Shortcuts



© 2014-2019 plasma-ald.com