Custom ECR Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ECR hardware returned 9 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
2Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
3Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
4Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
5Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
6Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
7Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
8Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
9PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases