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  • Plasma-Enhanced Atomic Layer Deposition
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Teresa de los Arcos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Teresa de los Arcos returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
2Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
3PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
4Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition