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M. Wiesing Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. Wiesing returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor |
| 2 | Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy |