Publication Information

Title: Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition

Type: Journal

Info: ACS Appl. Mater. Interfaces, 2014, 6 (9), pp 6731-6738

Date: 2014-04-08

DOI: http://dx.doi.org/10.1021/am500458d

Author Information

Name

Institution

Pohang University of Science and Technology (POSTECH)

Films

Deposition Temperature = 100C

75-24-1

7782-44-7

Deposition Temperature = 100C

75-24-1

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

202



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