Publication Information

Title:
Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
Type:
Journal
Info:
ECS Transactions, 80 (3) 87-95 (2017)
Date:
2017-06-01

Author Information

Name Institution
Stephan AussenPeter-Grünberg Institute
Alexander HardtdegenPeter-Grünberg Institute
Katharina SkajaPeter-Grünberg Institute
Susanne Hoffmann-EifertPeter-Grünberg Institute

Films



Plasma Al2O3


Film/Plasma Properties

Characteristic: Interlayer
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Substrates

Pt
Ta
Hf

Keywords

Notes

1400