Susanne Hoffmann-Eifert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Susanne Hoffmann-Eifert returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
2Forming-free metal-oxide ReRAM by oxygen ion implantation process
3Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
4Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
5Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices