Alexander Hardtdegen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Hardtdegen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Forming-free metal-oxide ReRAM by oxygen ion implantation process
2Interfaces Formed by ALD Metal Oxide Growth on Metal Layers