Publication Information

Title:
Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
Type:
Journal
Info:
Journal of Applied Physics 119, 244101 (2016)
Date:
2016-06-08

Author Information

Name Institution
M. KassmiGrenoble Alps University (UGA)
John PointetGrenoble Alps University (UGA)
Patrice GononGrenoble Alps University (UGA)
Ahmad BsiesyGrenoble Alps University (UGA)
Christophe ValléeGrenoble Alps University (UGA)
F. JomniEl Manar University

Films


Film/Plasma Properties

Substrates

Keywords

Notes

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