Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
Type:
Journal
Info:
Journal of Applied Physics 119, 244101 (2016)
Date:
2016-06-08
Author Information
Name | Institution |
---|---|
M. Kassmi | Grenoble Alps University (UGA) |
John Pointet | Grenoble Alps University (UGA) |
Patrice Gonon | Grenoble Alps University (UGA) |
Ahmad Bsiesy | Grenoble Alps University (UGA) |
Christophe Vallée | Grenoble Alps University (UGA) |
F. Jomni | El Manar University |
Films
Plasma AlTixOy
Film/Plasma Properties
Substrates
Keywords
Notes
834 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |