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Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
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Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2014, 6 (14), pp 11649-11656
Date:
2014-07-02
Author Information
| Name | Institution |
|---|---|
| Mi-Jin Jin | Ulsan National Institute of Science and Technology |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
| 227 |