Publication Information

Title:
Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
Type:
Journal
Info:
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS Vol. 16, No. 6, pp. 346-350, December 25, 2015
Date:
2015-11-11

Author Information

Name Institution
Jong-Chang WooChung-Ang University
Young-Hee JooChung-Ang University
Chang-Il KimChung-Ang University

Films

Plasma TiO2

Hardware used: Unknown


Film/Plasma Properties

Substrates

Si(100)

Keywords

Plasma etch of PEALD films

Notes

448