Chang-Il Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Chang-Il Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma |
| 2 | High-density plasma etching characteristics of indium-gallium-zinc oxide thin films in CF4/Ar plasma |