Young-Hee Joo Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Young-Hee Joo returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||High-density plasma etching characteristics of indium-gallium-zinc oxide thin films in CF4/Ar plasma|
|2||Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma|