Publication Information

Title:
Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
Type:
Journal
Info:
Applied Physics Letters 97, 042109 (2010)
Date:
2010-07-06

Author Information

Name Institution
Hu Young JeongKorea Advanced Institute of Science and Technology
Jeong Yong LeeKorea Advanced Institute of Science and Technology
Sung-Yool ChoiElectronics and Telecommunication Research Institute, (ETRI)

Films

Plasma TiO2

Hardware used: ASM Genitech MP-1000


Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Electrical Properties
Analysis: I-V, Current-Voltage Measurements

Characteristic: Resistive Switching
Analysis: I-V, Current-Voltage Measurements

Substrates

Al

Keywords

Resistance RAM

Notes

1470