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Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
Type:
Journal
Info:
Applied Physics Letters 97, 042109 (2010)
Date:
2010-07-06
Author Information
| Name | Institution |
|---|---|
| Hu Young Jeong | Korea Advanced Institute of Science and Technology |
| Jeong Yong Lee | Korea Advanced Institute of Science and Technology |
| Sung-Yool Choi | Electronics and Telecommunication Research Institute, (ETRI) |
Films
Plasma TiO2
Hardware used: ASM Genitech MP-1000
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Electrical Properties
Analysis: I-V, Current-Voltage Measurements
Characteristic: Resistive Switching
Analysis: I-V, Current-Voltage Measurements
Substrates
| Al |
Notes
| 1470 |