The publication database currently has 1603 entries.
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200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
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Search 1603 plasma ALD publications by:
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ASM Genitech MP-1000 Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using ASM Genitech MP-1000 hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films |