ASM Genitech MP-1000 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Genitech MP-1000 hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films