
Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
Type:
Journal
Info:
Micromachines 2021, 12, 588
Date:
2021-05-19
Author Information
Name | Institution |
---|---|
William Chiappim | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Giorgio E. Testoni | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Felipe Miranda | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Mariana A. Fraga | Universidade Federal de São Paulo |
Humber Furlan | Centro Estadual de Educação Tecnológica Paula Souza |
David Ardiles Saravia | Grenoble Alps University (UGA) |
Argemiro da Silva Sobrinho | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Gilberto Petraconi | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Homero S. Maciel | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Rodrigo S. Pessoa | Instituto Tecnológico de Aeronáutica (ITA-DCTA) |
Films
Plasma AlTixOy
Thermal AlTixOy
Plasma Al2O3
Thermal Al2O3
Plasma TiO2
Thermal TiO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Hardness
Analysis: Nanoindentation
Characteristic: Young's Modulus
Analysis: Nanoindentation
Characteristic: Elastic Modulus
Analysis: Nanoindentation
Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Characteristic: Reflectance Spectra
Analysis: UV-VIS Spectroscopy
Characteristic: Band Gap
Analysis: Ellipsometry
Substrates
Si(100) |
soda lime glass |
Notes
1625 |