Your search for plasma enhanced atomic layer deposition publications authored by Mariana A. Fraga returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion|
|2||Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode|
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